10/30/2012	9:58:54 AM	Main Vac valve closed
10/30/2012	9:59:00 AM	Main Vac valve opened
10/30/2012	9:59:20 AM	Main Vac valve closed
10/30/2012	10:02:42 AM	Main Vac valve opened
10/30/2012	10:04:52 AM	Main Vac valve closed
10/30/2012	10:04:54 AM	Helium valve opened
10/30/2012	10:06:00 AM	Helium valve closed
10/30/2012	10:06:01 AM	Bypass valve opened
10/30/2012	10:08:57 AM	Bypass valve closed
10/30/2012	10:08:57 AM	Main Vac valve opened
10/30/2012	10:09:45 AM	SiCl4 post valve closed
10/30/2012	10:09:58 AM	SiCl4 post valve opened
10/30/2012	10:10:07 AM	Main Vac valve closed
10/30/2012	10:10:08 AM	Helium valve opened
10/30/2012	10:11:27 AM	Helium valve closed
10/30/2012	10:12:13 AM	SiCl4 post valve closed
10/30/2012	10:16:06 AM	Bypass valve opened
10/30/2012	10:16:09 AM	SiCl4 post valve opened
10/30/2012	10:19:09 AM	Bypass valve closed
10/30/2012	10:19:13 AM	Main Vac valve opened
10/30/2012	10:23:34 AM	Main Vac valve closed
10/30/2012	10:24:57 AM	Main Vac valve opened
10/30/2012	10:26:48 AM	Main Vac valve closed
10/30/2012	10:27:12 AM	Helium valve opened
10/30/2012	10:28:32 AM	Helium valve closed
10/30/2012	10:31:38 AM	SiCl4 post valve closed
10/30/2012	10:41:26 AM	Bypass valve opened
10/30/2012	10:43:24 AM	SiCl4 post valve opened
10/30/2012	10:51:15 AM	Bypass valve closed
10/30/2012	10:51:16 AM	Main Vac valve opened
10/30/2012	10:59:37 AM	Main Vac valve closed
10/30/2012	10:59:39 AM	Helium valve opened
10/30/2012	11:00:58 AM	Helium valve closed
10/30/2012	11:01:03 AM	SiCl4 post valve closed
10/30/2012	11:19:22 AM	Bypass valve opened
10/30/2012	11:19:24 AM	SiCl4 post valve opened
10/30/2012	11:23:17 AM	Bypass valve closed
10/30/2012	11:23:18 AM	Main Vac valve opened
10/30/2012	11:25:03 AM	Main Vac valve closed
10/30/2012	11:25:09 AM	SiCl4 post valve closed
10/30/2012	11:25:21 AM	SiCl4 post valve opened
10/30/2012	11:25:30 AM	Main Vac valve opened
10/30/2012	11:28:05 AM	Main Vac valve closed
10/30/2012	11:29:26 AM	Main Vac valve opened
10/30/2012	12:03:11 PM	Main Vac valve closed
10/30/2012	12:03:45 PM	H2 valve opened
10/30/2012	12:03:54 PM	H2 MFC set to  100.000000
10/30/2012	12:04:30 PM	H2 valve closed
10/30/2012	12:08:34 PM	H2 valve opened
10/30/2012	12:08:56 PM	H2 MFC set to  500.000000
10/30/2012	12:09:21 PM	Helium MFC set to  0.000000
10/30/2012	12:10:03 PM	H2 MFC set to  500.000000
10/30/2012	12:10:04 PM	H2 valve closed
10/30/2012	12:10:06 PM	H2 MFC set to  0.000000
10/30/2012	12:27:00 PM	Bubbler valve opened
10/30/2012	12:27:04 PM	SiCl4 pre valve opened
10/30/2012	12:27:07 PM	SiCl4 MFC set to  50.000000
10/30/2012	12:27:17 PM	SiCl4 post valve closed
10/30/2012	12:27:17 PM	SiCl4 pre valve closed
10/30/2012	12:27:20 PM	Bubbler valve closed
10/30/2012	12:27:25 PM	SiCl4 post valve opened
10/30/2012	12:27:26 PM	SiCl4 post valve closed
10/30/2012	12:27:29 PM	SiCl4 pre valve opened
10/30/2012	12:27:31 PM	SiCl4 pre valve closed
10/30/2012	12:27:34 PM	Bubbler valve opened
10/30/2012	12:27:35 PM	SiCl4 post valve opened
10/30/2012	12:27:40 PM	Bubbler valve closed
10/30/2012	12:27:41 PM	SiCl4 post valve closed
10/30/2012	12:27:45 PM	SiCl4 pre valve opened
10/30/2012	12:27:54 PM	SiCl4 pre valve closed
10/30/2012	12:28:16 PM	SiCl4 post valve opened
10/30/2012	12:28:16 PM	SiCl4 post valve closed
10/30/2012	12:28:18 PM	SiCl4 post valve opened
10/30/2012	12:28:19 PM	SiCl4 post valve closed
10/30/2012	12:28:21 PM	Bubbler valve opened
10/30/2012	12:28:22 PM	Bubbler valve closed
10/30/2012	12:28:23 PM	SiCl4 pre valve opened
10/30/2012	12:28:30 PM	SiCl4 pre valve closed
10/30/2012	12:29:02 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:29:03 PM	SiCl4 post valve opened
10/30/2012	12:29:12 PM	Bubbler valve opened
10/30/2012	12:29:14 PM	Helium valve opened
10/30/2012	12:29:17 PM	SiCl4 post valve closed
10/30/2012	12:29:22 PM	Helium valve closed
10/30/2012	12:29:29 PM	SiCl4 post valve opened
10/30/2012	12:29:29 PM	SiCl4 pre valve opened
10/30/2012	12:29:32 PM	SiCl4 MFC set to  50.000000
10/30/2012	12:30:53 PM	SiCl4 pre valve closed
10/30/2012	12:30:53 PM	SiCl4 post valve closed
10/30/2012	12:30:54 PM	Bubbler valve closed
10/30/2012	12:30:57 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:31:02 PM	Bubbler valve opened
10/30/2012	12:31:03 PM	Helium valve opened
10/30/2012	12:31:06 PM	Helium MFC set to  250.000000
10/30/2012	12:40:17 PM	Helium valve closed
10/30/2012	12:40:18 PM	Bubbler valve closed
10/30/2012	12:40:21 PM	Helium MFC set to  0.000000
10/30/2012	12:48:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2012	12:48:27 PM	Recipe started at 12:48 PM
10/30/2012	12:48:27 PM	Helium valve closed
10/30/2012	12:48:27 PM	H2 valve closed
10/30/2012	12:48:27 PM	BCl3 valve closed
10/30/2012	12:48:27 PM	PH3 valve closed
10/30/2012	12:48:27 PM	SiCl4 pre valve closed
10/30/2012	12:48:27 PM	SiCl4 post valve closed
10/30/2012	12:48:27 PM	Main Vac valve closed
10/30/2012	12:48:27 PM	Bubbler valve closed
10/30/2012	12:48:27 PM	Bypass valve opened
10/30/2012	12:48:27 PM	Helium MFC set to  0.000000
10/30/2012	12:48:27 PM	H2 MFC set to  0.000000
10/30/2012	12:48:27 PM	BCl3 MFC set to  0.000000
10/30/2012	12:48:27 PM	PH3 MFC set to  0.000000
10/30/2012	12:48:27 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:48:27 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	12:48:27 PM	Tube furnace set to 0
10/30/2012	12:49:42 PM	Helium valve closed
10/30/2012	12:49:42 PM	H2 valve closed
10/30/2012	12:49:42 PM	BCl3 valve closed
10/30/2012	12:49:42 PM	PH3 valve closed
10/30/2012	12:49:42 PM	SiCl4 pre valve closed
10/30/2012	12:49:42 PM	SiCl4 post valve closed
10/30/2012	12:49:42 PM	Main Vac valve closed
10/30/2012	12:49:42 PM	Bubbler valve closed
10/30/2012	12:49:42 PM	Bypass valve opened
10/30/2012	12:49:42 PM	Helium MFC set to  0.000000
10/30/2012	12:49:42 PM	H2 MFC set to  0.000000
10/30/2012	12:49:42 PM	BCl3 MFC set to  0.000000
10/30/2012	12:49:42 PM	PH3 MFC set to  0.000000
10/30/2012	12:49:42 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:49:42 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	12:49:42 PM	Tube furnace set to 0
10/30/2012	12:50:42 PM	Helium valve closed
10/30/2012	12:50:42 PM	H2 valve closed
10/30/2012	12:50:42 PM	BCl3 valve closed
10/30/2012	12:50:42 PM	PH3 valve closed
10/30/2012	12:50:42 PM	SiCl4 pre valve closed
10/30/2012	12:50:42 PM	SiCl4 post valve closed
10/30/2012	12:50:42 PM	Bypass valve closed
10/30/2012	12:50:42 PM	Bubbler valve closed
10/30/2012	12:50:42 PM	Main Vac valve opened
10/30/2012	12:50:42 PM	Helium MFC set to  0.000000
10/30/2012	12:50:42 PM	H2 MFC set to  0.000000
10/30/2012	12:50:42 PM	BCl3 MFC set to  0.000000
10/30/2012	12:50:42 PM	PH3 MFC set to  0.000000
10/30/2012	12:50:42 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:50:42 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	12:50:43 PM	Tube furnace set to 0
10/30/2012	12:50:44 PM	Run finished at 12:50 PM
10/30/2012	12:50:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2012	12:53:14 PM	Tube furnace set to 200
10/30/2012	12:54:25 PM	Main Vac valve closed
10/30/2012	12:54:38 PM	Recipe started at 12:54 PM
10/30/2012	12:54:38 PM	Helium valve closed
10/30/2012	12:54:38 PM	H2 valve closed
10/30/2012	12:54:38 PM	BCl3 valve closed
10/30/2012	12:54:38 PM	PH3 valve closed
10/30/2012	12:54:38 PM	SiCl4 pre valve closed
10/30/2012	12:54:38 PM	SiCl4 post valve closed
10/30/2012	12:54:38 PM	Bypass valve closed
10/30/2012	12:54:38 PM	Bubbler valve closed
10/30/2012	12:54:38 PM	Main Vac valve opened
10/30/2012	12:54:38 PM	Helium MFC set to  0.000000
10/30/2012	12:54:38 PM	H2 MFC set to  0.000000
10/30/2012	12:54:38 PM	BCl3 MFC set to  0.000000
10/30/2012	12:54:38 PM	PH3 MFC set to  0.000000
10/30/2012	12:54:38 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:54:38 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	12:54:39 PM	Tube furnace set to 0
10/30/2012	12:55:09 PM	H2 valve closed
10/30/2012	12:55:09 PM	BCl3 valve closed
10/30/2012	12:55:09 PM	PH3 valve closed
10/30/2012	12:55:09 PM	SiCl4 pre valve closed
10/30/2012	12:55:09 PM	SiCl4 post valve closed
10/30/2012	12:55:09 PM	Bypass valve closed
10/30/2012	12:55:09 PM	Bubbler valve closed
10/30/2012	12:55:09 PM	Helium valve opened
10/30/2012	12:55:09 PM	Main Vac valve opened
10/30/2012	12:55:09 PM	Helium MFC set to  20.000000
10/30/2012	12:55:09 PM	H2 MFC set to  0.000000
10/30/2012	12:55:09 PM	BCl3 MFC set to  0.000000
10/30/2012	12:55:09 PM	PH3 MFC set to  0.000000
10/30/2012	12:55:09 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:55:09 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	12:55:09 PM	Tube furnace set to 0
10/30/2012	12:55:39 PM	Helium valve closed
10/30/2012	12:55:39 PM	H2 valve closed
10/30/2012	12:55:39 PM	BCl3 valve closed
10/30/2012	12:55:39 PM	PH3 valve closed
10/30/2012	12:55:39 PM	SiCl4 pre valve closed
10/30/2012	12:55:39 PM	SiCl4 post valve closed
10/30/2012	12:55:39 PM	Bypass valve closed
10/30/2012	12:55:39 PM	Bubbler valve closed
10/30/2012	12:55:39 PM	Main Vac valve opened
10/30/2012	12:55:39 PM	Helium MFC set to  0.000000
10/30/2012	12:55:39 PM	H2 MFC set to  0.000000
10/30/2012	12:55:39 PM	BCl3 MFC set to  0.000000
10/30/2012	12:55:39 PM	PH3 MFC set to  0.000000
10/30/2012	12:55:39 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:55:39 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	12:55:39 PM	Tube furnace set to 0
10/30/2012	12:56:09 PM	H2 valve closed
10/30/2012	12:56:09 PM	BCl3 valve closed
10/30/2012	12:56:09 PM	PH3 valve closed
10/30/2012	12:56:09 PM	SiCl4 pre valve closed
10/30/2012	12:56:09 PM	SiCl4 post valve closed
10/30/2012	12:56:09 PM	Bypass valve closed
10/30/2012	12:56:09 PM	Bubbler valve closed
10/30/2012	12:56:09 PM	Helium valve opened
10/30/2012	12:56:09 PM	Main Vac valve opened
10/30/2012	12:56:09 PM	Helium MFC set to  20.000000
10/30/2012	12:56:09 PM	H2 MFC set to  0.000000
10/30/2012	12:56:09 PM	BCl3 MFC set to  0.000000
10/30/2012	12:56:09 PM	PH3 MFC set to  0.000000
10/30/2012	12:56:09 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:56:09 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	12:56:09 PM	Tube furnace set to 0
10/30/2012	12:56:39 PM	Helium valve closed
10/30/2012	12:56:39 PM	H2 valve closed
10/30/2012	12:56:39 PM	BCl3 valve closed
10/30/2012	12:56:39 PM	PH3 valve closed
10/30/2012	12:56:39 PM	SiCl4 pre valve closed
10/30/2012	12:56:39 PM	SiCl4 post valve closed
10/30/2012	12:56:39 PM	Bypass valve closed
10/30/2012	12:56:39 PM	Bubbler valve closed
10/30/2012	12:56:39 PM	Main Vac valve opened
10/30/2012	12:56:39 PM	Helium MFC set to  0.000000
10/30/2012	12:56:39 PM	H2 MFC set to  0.000000
10/30/2012	12:56:39 PM	BCl3 MFC set to  0.000000
10/30/2012	12:56:39 PM	PH3 MFC set to  0.000000
10/30/2012	12:56:39 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:56:39 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	12:56:40 PM	Tube furnace set to 0
10/30/2012	12:57:10 PM	H2 valve closed
10/30/2012	12:57:10 PM	BCl3 valve closed
10/30/2012	12:57:10 PM	PH3 valve closed
10/30/2012	12:57:10 PM	SiCl4 pre valve closed
10/30/2012	12:57:10 PM	SiCl4 post valve closed
10/30/2012	12:57:10 PM	Bypass valve closed
10/30/2012	12:57:10 PM	Bubbler valve closed
10/30/2012	12:57:10 PM	Helium valve opened
10/30/2012	12:57:10 PM	Main Vac valve opened
10/30/2012	12:57:10 PM	Helium MFC set to  20.000000
10/30/2012	12:57:10 PM	H2 MFC set to  0.000000
10/30/2012	12:57:10 PM	BCl3 MFC set to  0.000000
10/30/2012	12:57:10 PM	PH3 MFC set to  0.000000
10/30/2012	12:57:10 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:57:10 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	12:57:10 PM	Tube furnace set to 0
10/30/2012	12:57:40 PM	Helium valve closed
10/30/2012	12:57:40 PM	H2 valve closed
10/30/2012	12:57:40 PM	BCl3 valve closed
10/30/2012	12:57:40 PM	PH3 valve closed
10/30/2012	12:57:40 PM	SiCl4 pre valve closed
10/30/2012	12:57:40 PM	SiCl4 post valve closed
10/30/2012	12:57:40 PM	Bypass valve closed
10/30/2012	12:57:40 PM	Bubbler valve closed
10/30/2012	12:57:40 PM	Main Vac valve opened
10/30/2012	12:57:40 PM	Helium MFC set to  0.000000
10/30/2012	12:57:40 PM	H2 MFC set to  0.000000
10/30/2012	12:57:40 PM	BCl3 MFC set to  0.000000
10/30/2012	12:57:40 PM	PH3 MFC set to  0.000000
10/30/2012	12:57:40 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:57:40 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	12:57:40 PM	Tube furnace set to 0
10/30/2012	12:58:10 PM	H2 valve closed
10/30/2012	12:58:10 PM	BCl3 valve closed
10/30/2012	12:58:10 PM	PH3 valve closed
10/30/2012	12:58:10 PM	SiCl4 pre valve closed
10/30/2012	12:58:10 PM	SiCl4 post valve closed
10/30/2012	12:58:10 PM	Bypass valve closed
10/30/2012	12:58:10 PM	Bubbler valve closed
10/30/2012	12:58:10 PM	Helium valve opened
10/30/2012	12:58:10 PM	Main Vac valve opened
10/30/2012	12:58:10 PM	Helium MFC set to  20.000000
10/30/2012	12:58:10 PM	H2 MFC set to  0.000000
10/30/2012	12:58:10 PM	BCl3 MFC set to  0.000000
10/30/2012	12:58:10 PM	PH3 MFC set to  0.000000
10/30/2012	12:58:10 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:58:10 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	12:58:10 PM	Tube furnace set to 0
10/30/2012	12:58:40 PM	Helium valve closed
10/30/2012	12:58:40 PM	H2 valve closed
10/30/2012	12:58:40 PM	BCl3 valve closed
10/30/2012	12:58:40 PM	PH3 valve closed
10/30/2012	12:58:40 PM	SiCl4 pre valve closed
10/30/2012	12:58:40 PM	SiCl4 post valve closed
10/30/2012	12:58:40 PM	Bypass valve closed
10/30/2012	12:58:40 PM	Bubbler valve closed
10/30/2012	12:58:40 PM	Main Vac valve opened
10/30/2012	12:58:40 PM	Helium MFC set to  0.000000
10/30/2012	12:58:40 PM	H2 MFC set to  0.000000
10/30/2012	12:58:40 PM	BCl3 MFC set to  0.000000
10/30/2012	12:58:40 PM	PH3 MFC set to  0.000000
10/30/2012	12:58:40 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:58:40 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	12:58:41 PM	Tube furnace set to 0
10/30/2012	12:59:11 PM	H2 valve closed
10/30/2012	12:59:11 PM	BCl3 valve closed
10/30/2012	12:59:11 PM	PH3 valve closed
10/30/2012	12:59:11 PM	SiCl4 pre valve closed
10/30/2012	12:59:11 PM	SiCl4 post valve closed
10/30/2012	12:59:11 PM	Bypass valve closed
10/30/2012	12:59:11 PM	Bubbler valve closed
10/30/2012	12:59:11 PM	Helium valve opened
10/30/2012	12:59:11 PM	Main Vac valve opened
10/30/2012	12:59:11 PM	Helium MFC set to  20.000000
10/30/2012	12:59:11 PM	H2 MFC set to  0.000000
10/30/2012	12:59:11 PM	BCl3 MFC set to  0.000000
10/30/2012	12:59:11 PM	PH3 MFC set to  0.000000
10/30/2012	12:59:11 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:59:11 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	12:59:11 PM	Tube furnace set to 0
10/30/2012	12:59:41 PM	Helium valve closed
10/30/2012	12:59:41 PM	H2 valve closed
10/30/2012	12:59:41 PM	BCl3 valve closed
10/30/2012	12:59:41 PM	PH3 valve closed
10/30/2012	12:59:41 PM	SiCl4 pre valve closed
10/30/2012	12:59:41 PM	SiCl4 post valve closed
10/30/2012	12:59:41 PM	Bypass valve closed
10/30/2012	12:59:41 PM	Bubbler valve closed
10/30/2012	12:59:41 PM	Main Vac valve opened
10/30/2012	12:59:41 PM	Helium MFC set to  0.000000
10/30/2012	12:59:41 PM	H2 MFC set to  0.000000
10/30/2012	12:59:41 PM	BCl3 MFC set to  0.000000
10/30/2012	12:59:41 PM	PH3 MFC set to  0.000000
10/30/2012	12:59:41 PM	SiCl4 MFC set to  0.000000
10/30/2012	12:59:41 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	12:59:41 PM	Tube furnace set to 0
10/30/2012	1:00:11 PM	H2 valve closed
10/30/2012	1:00:11 PM	BCl3 valve closed
10/30/2012	1:00:11 PM	PH3 valve closed
10/30/2012	1:00:11 PM	SiCl4 pre valve closed
10/30/2012	1:00:11 PM	SiCl4 post valve closed
10/30/2012	1:00:11 PM	Bypass valve closed
10/30/2012	1:00:11 PM	Bubbler valve closed
10/30/2012	1:00:11 PM	Helium valve opened
10/30/2012	1:00:11 PM	Main Vac valve opened
10/30/2012	1:00:11 PM	Helium MFC set to  20.000000
10/30/2012	1:00:11 PM	H2 MFC set to  0.000000
10/30/2012	1:00:11 PM	BCl3 MFC set to  0.000000
10/30/2012	1:00:11 PM	PH3 MFC set to  0.000000
10/30/2012	1:00:11 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:00:11 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:00:11 PM	Tube furnace set to 0
10/30/2012	1:00:41 PM	Helium valve closed
10/30/2012	1:00:41 PM	H2 valve closed
10/30/2012	1:00:41 PM	BCl3 valve closed
10/30/2012	1:00:41 PM	PH3 valve closed
10/30/2012	1:00:41 PM	SiCl4 pre valve closed
10/30/2012	1:00:41 PM	SiCl4 post valve closed
10/30/2012	1:00:41 PM	Bypass valve closed
10/30/2012	1:00:41 PM	Bubbler valve closed
10/30/2012	1:00:41 PM	Main Vac valve opened
10/30/2012	1:00:41 PM	Helium MFC set to  0.000000
10/30/2012	1:00:42 PM	H2 MFC set to  0.000000
10/30/2012	1:00:42 PM	BCl3 MFC set to  0.000000
10/30/2012	1:00:42 PM	PH3 MFC set to  0.000000
10/30/2012	1:00:42 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:00:42 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:00:42 PM	Tube furnace set to 0
10/30/2012	1:01:12 PM	H2 valve closed
10/30/2012	1:01:12 PM	BCl3 valve closed
10/30/2012	1:01:12 PM	PH3 valve closed
10/30/2012	1:01:12 PM	SiCl4 pre valve closed
10/30/2012	1:01:12 PM	SiCl4 post valve closed
10/30/2012	1:01:12 PM	Bypass valve closed
10/30/2012	1:01:12 PM	Bubbler valve closed
10/30/2012	1:01:12 PM	Helium valve opened
10/30/2012	1:01:12 PM	Main Vac valve opened
10/30/2012	1:01:12 PM	Helium MFC set to  20.000000
10/30/2012	1:01:12 PM	H2 MFC set to  0.000000
10/30/2012	1:01:12 PM	BCl3 MFC set to  0.000000
10/30/2012	1:01:12 PM	PH3 MFC set to  0.000000
10/30/2012	1:01:12 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:01:12 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:01:12 PM	Tube furnace set to 0
10/30/2012	1:01:42 PM	Helium valve closed
10/30/2012	1:01:42 PM	H2 valve closed
10/30/2012	1:01:42 PM	BCl3 valve closed
10/30/2012	1:01:42 PM	PH3 valve closed
10/30/2012	1:01:42 PM	SiCl4 pre valve closed
10/30/2012	1:01:42 PM	SiCl4 post valve closed
10/30/2012	1:01:42 PM	Bypass valve closed
10/30/2012	1:01:42 PM	Bubbler valve closed
10/30/2012	1:01:42 PM	Main Vac valve opened
10/30/2012	1:01:42 PM	Helium MFC set to  0.000000
10/30/2012	1:01:42 PM	H2 MFC set to  0.000000
10/30/2012	1:01:42 PM	BCl3 MFC set to  0.000000
10/30/2012	1:01:42 PM	PH3 MFC set to  0.000000
10/30/2012	1:01:42 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:01:42 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:01:42 PM	Tube furnace set to 0
10/30/2012	1:02:12 PM	H2 valve closed
10/30/2012	1:02:12 PM	BCl3 valve closed
10/30/2012	1:02:12 PM	PH3 valve closed
10/30/2012	1:02:12 PM	SiCl4 pre valve closed
10/30/2012	1:02:12 PM	SiCl4 post valve closed
10/30/2012	1:02:12 PM	Bypass valve closed
10/30/2012	1:02:12 PM	Bubbler valve closed
10/30/2012	1:02:12 PM	Helium valve opened
10/30/2012	1:02:12 PM	Main Vac valve opened
10/30/2012	1:02:12 PM	Helium MFC set to  20.000000
10/30/2012	1:02:12 PM	H2 MFC set to  0.000000
10/30/2012	1:02:12 PM	BCl3 MFC set to  0.000000
10/30/2012	1:02:12 PM	PH3 MFC set to  0.000000
10/30/2012	1:02:12 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:02:12 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:02:12 PM	Tube furnace set to 0
10/30/2012	1:02:42 PM	Helium valve closed
10/30/2012	1:02:42 PM	H2 valve closed
10/30/2012	1:02:42 PM	BCl3 valve closed
10/30/2012	1:02:42 PM	PH3 valve closed
10/30/2012	1:02:42 PM	SiCl4 pre valve closed
10/30/2012	1:02:42 PM	SiCl4 post valve closed
10/30/2012	1:02:42 PM	Bypass valve closed
10/30/2012	1:02:42 PM	Bubbler valve closed
10/30/2012	1:02:43 PM	Main Vac valve opened
10/30/2012	1:02:43 PM	Helium MFC set to  0.000000
10/30/2012	1:02:43 PM	H2 MFC set to  0.000000
10/30/2012	1:02:43 PM	BCl3 MFC set to  0.000000
10/30/2012	1:02:43 PM	PH3 MFC set to  0.000000
10/30/2012	1:02:43 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:02:43 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:02:43 PM	Tube furnace set to 0
10/30/2012	1:03:13 PM	H2 valve closed
10/30/2012	1:03:13 PM	BCl3 valve closed
10/30/2012	1:03:13 PM	PH3 valve closed
10/30/2012	1:03:13 PM	SiCl4 pre valve closed
10/30/2012	1:03:13 PM	SiCl4 post valve closed
10/30/2012	1:03:13 PM	Bypass valve closed
10/30/2012	1:03:13 PM	Bubbler valve closed
10/30/2012	1:03:13 PM	Helium valve opened
10/30/2012	1:03:13 PM	Main Vac valve opened
10/30/2012	1:03:13 PM	Helium MFC set to  20.000000
10/30/2012	1:03:13 PM	H2 MFC set to  0.000000
10/30/2012	1:03:13 PM	BCl3 MFC set to  0.000000
10/30/2012	1:03:13 PM	PH3 MFC set to  0.000000
10/30/2012	1:03:13 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:03:13 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:03:13 PM	Tube furnace set to 0
10/30/2012	1:03:43 PM	Helium valve closed
10/30/2012	1:03:43 PM	H2 valve closed
10/30/2012	1:03:43 PM	BCl3 valve closed
10/30/2012	1:03:43 PM	PH3 valve closed
10/30/2012	1:03:43 PM	SiCl4 pre valve closed
10/30/2012	1:03:43 PM	SiCl4 post valve closed
10/30/2012	1:03:43 PM	Bypass valve closed
10/30/2012	1:03:43 PM	Bubbler valve closed
10/30/2012	1:03:43 PM	Main Vac valve opened
10/30/2012	1:03:43 PM	Helium MFC set to  0.000000
10/30/2012	1:03:43 PM	H2 MFC set to  0.000000
10/30/2012	1:03:43 PM	BCl3 MFC set to  0.000000
10/30/2012	1:03:43 PM	PH3 MFC set to  0.000000
10/30/2012	1:03:43 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:03:43 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:03:43 PM	Tube furnace set to 200
10/30/2012	1:04:13 PM	H2 valve closed
10/30/2012	1:04:13 PM	BCl3 valve closed
10/30/2012	1:04:13 PM	PH3 valve closed
10/30/2012	1:04:13 PM	SiCl4 pre valve closed
10/30/2012	1:04:13 PM	SiCl4 post valve closed
10/30/2012	1:04:13 PM	Bypass valve closed
10/30/2012	1:04:13 PM	Bubbler valve closed
10/30/2012	1:04:13 PM	Helium valve opened
10/30/2012	1:04:13 PM	Main Vac valve opened
10/30/2012	1:04:13 PM	Helium MFC set to  20.000000
10/30/2012	1:04:13 PM	H2 MFC set to  0.000000
10/30/2012	1:04:13 PM	BCl3 MFC set to  0.000000
10/30/2012	1:04:13 PM	PH3 MFC set to  0.000000
10/30/2012	1:04:13 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:04:13 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:04:13 PM	Tube furnace set to 200
10/30/2012	1:04:43 PM	Helium valve closed
10/30/2012	1:04:43 PM	H2 valve closed
10/30/2012	1:04:43 PM	BCl3 valve closed
10/30/2012	1:04:43 PM	PH3 valve closed
10/30/2012	1:04:44 PM	SiCl4 pre valve closed
10/30/2012	1:04:44 PM	SiCl4 post valve closed
10/30/2012	1:04:44 PM	Bypass valve closed
10/30/2012	1:04:44 PM	Bubbler valve closed
10/30/2012	1:04:44 PM	Main Vac valve opened
10/30/2012	1:04:44 PM	Helium MFC set to  0.000000
10/30/2012	1:04:44 PM	H2 MFC set to  0.000000
10/30/2012	1:04:44 PM	BCl3 MFC set to  0.000000
10/30/2012	1:04:44 PM	PH3 MFC set to  0.000000
10/30/2012	1:04:44 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:04:44 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:04:44 PM	Tube furnace set to 200
10/30/2012	1:05:14 PM	H2 valve closed
10/30/2012	1:05:14 PM	BCl3 valve closed
10/30/2012	1:05:14 PM	PH3 valve closed
10/30/2012	1:05:14 PM	SiCl4 pre valve closed
10/30/2012	1:05:14 PM	SiCl4 post valve closed
10/30/2012	1:05:14 PM	Bypass valve closed
10/30/2012	1:05:14 PM	Bubbler valve closed
10/30/2012	1:05:14 PM	Helium valve opened
10/30/2012	1:05:14 PM	Main Vac valve opened
10/30/2012	1:05:14 PM	Helium MFC set to  20.000000
10/30/2012	1:05:14 PM	H2 MFC set to  0.000000
10/30/2012	1:05:14 PM	BCl3 MFC set to  0.000000
10/30/2012	1:05:14 PM	PH3 MFC set to  0.000000
10/30/2012	1:05:14 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:05:14 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:05:14 PM	Tube furnace set to 200
10/30/2012	1:05:44 PM	Helium valve closed
10/30/2012	1:05:44 PM	H2 valve closed
10/30/2012	1:05:44 PM	BCl3 valve closed
10/30/2012	1:05:44 PM	PH3 valve closed
10/30/2012	1:05:44 PM	SiCl4 pre valve closed
10/30/2012	1:05:44 PM	SiCl4 post valve closed
10/30/2012	1:05:44 PM	Bypass valve closed
10/30/2012	1:05:44 PM	Bubbler valve closed
10/30/2012	1:05:44 PM	Main Vac valve opened
10/30/2012	1:05:44 PM	Helium MFC set to  0.000000
10/30/2012	1:05:44 PM	H2 MFC set to  0.000000
10/30/2012	1:05:44 PM	BCl3 MFC set to  0.000000
10/30/2012	1:05:44 PM	PH3 MFC set to  0.000000
10/30/2012	1:05:44 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:05:44 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:05:44 PM	Tube furnace set to 200
10/30/2012	1:06:14 PM	H2 valve closed
10/30/2012	1:06:14 PM	BCl3 valve closed
10/30/2012	1:06:14 PM	PH3 valve closed
10/30/2012	1:06:14 PM	SiCl4 pre valve closed
10/30/2012	1:06:14 PM	SiCl4 post valve closed
10/30/2012	1:06:14 PM	Bypass valve closed
10/30/2012	1:06:14 PM	Bubbler valve closed
10/30/2012	1:06:14 PM	Helium valve opened
10/30/2012	1:06:14 PM	Main Vac valve opened
10/30/2012	1:06:14 PM	Helium MFC set to  20.000000
10/30/2012	1:06:14 PM	H2 MFC set to  0.000000
10/30/2012	1:06:14 PM	BCl3 MFC set to  0.000000
10/30/2012	1:06:14 PM	PH3 MFC set to  0.000000
10/30/2012	1:06:14 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:06:14 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:06:14 PM	Tube furnace set to 200
10/30/2012	1:06:45 PM	Helium valve closed
10/30/2012	1:06:45 PM	H2 valve closed
10/30/2012	1:06:45 PM	BCl3 valve closed
10/30/2012	1:06:45 PM	PH3 valve closed
10/30/2012	1:06:45 PM	SiCl4 pre valve closed
10/30/2012	1:06:45 PM	SiCl4 post valve closed
10/30/2012	1:06:45 PM	Bypass valve closed
10/30/2012	1:06:45 PM	Bubbler valve closed
10/30/2012	1:06:45 PM	Main Vac valve opened
10/30/2012	1:06:45 PM	Helium MFC set to  0.000000
10/30/2012	1:06:45 PM	H2 MFC set to  0.000000
10/30/2012	1:06:45 PM	BCl3 MFC set to  0.000000
10/30/2012	1:06:45 PM	PH3 MFC set to  0.000000
10/30/2012	1:06:45 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:06:45 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:06:45 PM	Tube furnace set to 200
10/30/2012	1:07:15 PM	H2 valve closed
10/30/2012	1:07:15 PM	BCl3 valve closed
10/30/2012	1:07:15 PM	PH3 valve closed
10/30/2012	1:07:15 PM	SiCl4 pre valve closed
10/30/2012	1:07:15 PM	SiCl4 post valve closed
10/30/2012	1:07:15 PM	Bypass valve closed
10/30/2012	1:07:15 PM	Bubbler valve closed
10/30/2012	1:07:15 PM	Helium valve opened
10/30/2012	1:07:15 PM	Main Vac valve opened
10/30/2012	1:07:15 PM	Helium MFC set to  20.000000
10/30/2012	1:07:15 PM	H2 MFC set to  0.000000
10/30/2012	1:07:15 PM	BCl3 MFC set to  0.000000
10/30/2012	1:07:15 PM	PH3 MFC set to  0.000000
10/30/2012	1:07:15 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:07:15 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:07:15 PM	Tube furnace set to 200
10/30/2012	1:07:45 PM	Helium valve closed
10/30/2012	1:07:45 PM	H2 valve closed
10/30/2012	1:07:45 PM	BCl3 valve closed
10/30/2012	1:07:45 PM	PH3 valve closed
10/30/2012	1:07:45 PM	SiCl4 pre valve closed
10/30/2012	1:07:45 PM	SiCl4 post valve closed
10/30/2012	1:07:45 PM	Bypass valve closed
10/30/2012	1:07:45 PM	Bubbler valve closed
10/30/2012	1:07:45 PM	Main Vac valve opened
10/30/2012	1:07:45 PM	Helium MFC set to  0.000000
10/30/2012	1:07:45 PM	H2 MFC set to  0.000000
10/30/2012	1:07:45 PM	BCl3 MFC set to  0.000000
10/30/2012	1:07:45 PM	PH3 MFC set to  0.000000
10/30/2012	1:07:45 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:07:45 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:07:45 PM	Tube furnace set to 200
10/30/2012	1:08:15 PM	H2 valve closed
10/30/2012	1:08:15 PM	BCl3 valve closed
10/30/2012	1:08:15 PM	PH3 valve closed
10/30/2012	1:08:15 PM	SiCl4 pre valve closed
10/30/2012	1:08:15 PM	SiCl4 post valve closed
10/30/2012	1:08:15 PM	Bypass valve closed
10/30/2012	1:08:15 PM	Bubbler valve closed
10/30/2012	1:08:15 PM	Helium valve opened
10/30/2012	1:08:15 PM	Main Vac valve opened
10/30/2012	1:08:15 PM	Helium MFC set to  20.000000
10/30/2012	1:08:15 PM	H2 MFC set to  0.000000
10/30/2012	1:08:15 PM	BCl3 MFC set to  0.000000
10/30/2012	1:08:15 PM	PH3 MFC set to  0.000000
10/30/2012	1:08:15 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:08:15 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:08:15 PM	Tube furnace set to 200
10/30/2012	1:08:46 PM	Helium valve closed
10/30/2012	1:08:46 PM	H2 valve closed
10/30/2012	1:08:46 PM	BCl3 valve closed
10/30/2012	1:08:46 PM	PH3 valve closed
10/30/2012	1:08:46 PM	SiCl4 pre valve closed
10/30/2012	1:08:46 PM	SiCl4 post valve closed
10/30/2012	1:08:46 PM	Bypass valve closed
10/30/2012	1:08:46 PM	Bubbler valve closed
10/30/2012	1:08:46 PM	Main Vac valve opened
10/30/2012	1:08:46 PM	Helium MFC set to  0.000000
10/30/2012	1:08:46 PM	H2 MFC set to  0.000000
10/30/2012	1:08:46 PM	BCl3 MFC set to  0.000000
10/30/2012	1:08:46 PM	PH3 MFC set to  0.000000
10/30/2012	1:08:46 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:08:46 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:08:46 PM	Tube furnace set to 200
10/30/2012	1:09:16 PM	H2 valve closed
10/30/2012	1:09:16 PM	BCl3 valve closed
10/30/2012	1:09:16 PM	PH3 valve closed
10/30/2012	1:09:16 PM	SiCl4 pre valve closed
10/30/2012	1:09:16 PM	SiCl4 post valve closed
10/30/2012	1:09:16 PM	Bypass valve closed
10/30/2012	1:09:16 PM	Bubbler valve closed
10/30/2012	1:09:16 PM	Helium valve opened
10/30/2012	1:09:16 PM	Main Vac valve opened
10/30/2012	1:09:16 PM	Helium MFC set to  20.000000
10/30/2012	1:09:16 PM	H2 MFC set to  0.000000
10/30/2012	1:09:16 PM	BCl3 MFC set to  0.000000
10/30/2012	1:09:16 PM	PH3 MFC set to  0.000000
10/30/2012	1:09:16 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:09:16 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:09:16 PM	Tube furnace set to 200
10/30/2012	1:09:46 PM	Helium valve closed
10/30/2012	1:09:46 PM	H2 valve closed
10/30/2012	1:09:46 PM	BCl3 valve closed
10/30/2012	1:09:46 PM	PH3 valve closed
10/30/2012	1:09:46 PM	SiCl4 pre valve closed
10/30/2012	1:09:46 PM	SiCl4 post valve closed
10/30/2012	1:09:46 PM	Bypass valve closed
10/30/2012	1:09:46 PM	Bubbler valve closed
10/30/2012	1:09:46 PM	Main Vac valve opened
10/30/2012	1:09:46 PM	Helium MFC set to  0.000000
10/30/2012	1:09:46 PM	H2 MFC set to  0.000000
10/30/2012	1:09:46 PM	BCl3 MFC set to  0.000000
10/30/2012	1:09:46 PM	PH3 MFC set to  0.000000
10/30/2012	1:09:46 PM	SiCl4 MFC set to  0.000000
10/30/2012	1:09:46 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	1:09:46 PM	Tube furnace set to 0
10/30/2012	1:09:47 PM	Run finished at 1:09 PM
10/30/2012	2:09:17 PM	Recipe started at 2:09 PM
10/30/2012	2:09:17 PM	Helium valve closed
10/30/2012	2:09:17 PM	H2 valve closed
10/30/2012	2:09:17 PM	BCl3 valve closed
10/30/2012	2:09:17 PM	PH3 valve closed
10/30/2012	2:09:17 PM	SiCl4 pre valve closed
10/30/2012	2:09:17 PM	SiCl4 post valve closed
10/30/2012	2:09:17 PM	Main Vac valve closed
10/30/2012	2:09:17 PM	Bypass valve closed
10/30/2012	2:09:17 PM	Bubbler valve closed
10/30/2012	2:09:17 PM	Helium MFC set to  0.000000
10/30/2012	2:09:17 PM	H2 MFC set to  0.000000
10/30/2012	2:09:17 PM	BCl3 MFC set to  0.000000
10/30/2012	2:09:17 PM	PH3 MFC set to  0.000000
10/30/2012	2:09:17 PM	SiCl4 MFC set to  0.000000
10/30/2012	2:09:17 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	2:09:18 PM	Tube furnace set to 0
10/30/2012	2:09:21 PM	Helium valve closed
10/30/2012	2:09:21 PM	BCl3 valve closed
10/30/2012	2:09:21 PM	PH3 valve closed
10/30/2012	2:09:21 PM	SiCl4 pre valve closed
10/30/2012	2:09:21 PM	SiCl4 post valve closed
10/30/2012	2:09:21 PM	Main Vac valve closed
10/30/2012	2:09:21 PM	Bypass valve closed
10/30/2012	2:09:21 PM	Bubbler valve closed
10/30/2012	2:09:21 PM	H2 valve opened
10/30/2012	2:09:21 PM	Helium MFC set to  0.000000
10/30/2012	2:09:21 PM	H2 MFC set to  500.000000
10/30/2012	2:09:21 PM	BCl3 MFC set to  0.000000
10/30/2012	2:09:21 PM	PH3 MFC set to  0.000000
10/30/2012	2:09:21 PM	SiCl4 MFC set to  0.000000
10/30/2012	2:09:21 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	2:09:21 PM	Tube furnace set to 0
10/30/2012	2:10:36 PM	Helium valve closed
10/30/2012	2:10:36 PM	BCl3 valve closed
10/30/2012	2:10:36 PM	PH3 valve closed
10/30/2012	2:10:36 PM	SiCl4 pre valve closed
10/30/2012	2:10:36 PM	SiCl4 post valve closed
10/30/2012	2:10:36 PM	Main Vac valve closed
10/30/2012	2:10:36 PM	Bypass valve closed
10/30/2012	2:10:36 PM	H2 valve opened
10/30/2012	2:10:36 PM	Bubbler valve opened
10/30/2012	2:10:36 PM	Helium MFC set to  0.000000
10/30/2012	2:10:36 PM	H2 MFC set to  500.000000
10/30/2012	2:10:36 PM	BCl3 MFC set to  0.000000
10/30/2012	2:10:36 PM	PH3 MFC set to  0.000000
10/30/2012	2:10:36 PM	SiCl4 MFC set to  0.000000
10/30/2012	2:10:36 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	2:10:36 PM	Tube furnace set to 0
10/30/2012	2:10:37 PM	Helium valve closed
10/30/2012	2:10:37 PM	BCl3 valve closed
10/30/2012	2:10:37 PM	PH3 valve closed
10/30/2012	2:10:37 PM	SiCl4 pre valve closed
10/30/2012	2:10:37 PM	SiCl4 post valve closed
10/30/2012	2:10:37 PM	Main Vac valve closed
10/30/2012	2:10:37 PM	Bypass valve closed
10/30/2012	2:10:37 PM	H2 valve opened
10/30/2012	2:10:37 PM	Bubbler valve opened
10/30/2012	2:10:37 PM	Helium MFC set to  0.000000
10/30/2012	2:10:37 PM	H2 MFC set to  500.000000
10/30/2012	2:10:37 PM	BCl3 MFC set to  0.000000
10/30/2012	2:10:37 PM	PH3 MFC set to  0.000000
10/30/2012	2:10:37 PM	SiCl4 MFC set to  0.000000
10/30/2012	2:10:37 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	2:10:37 PM	Tube furnace set to 1000
10/30/2012	2:30:37 PM	Helium valve closed
10/30/2012	2:30:37 PM	PH3 valve closed
10/30/2012	2:30:37 PM	Main Vac valve closed
10/30/2012	2:30:37 PM	Bypass valve closed
10/30/2012	2:30:37 PM	H2 valve opened
10/30/2012	2:30:37 PM	BCl3 valve opened
10/30/2012	2:30:37 PM	SiCl4 pre valve opened
10/30/2012	2:30:37 PM	SiCl4 post valve opened
10/30/2012	2:30:37 PM	Bubbler valve opened
10/30/2012	2:30:37 PM	Helium MFC set to  0.000000
10/30/2012	2:30:37 PM	H2 MFC set to  450.000000
10/30/2012	2:30:37 PM	BCl3 MFC set to  1.500000
10/30/2012	2:30:37 PM	PH3 MFC set to  0.000000
10/30/2012	2:30:37 PM	SiCl4 MFC set to  50.000000
10/30/2012	2:30:37 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	2:30:37 PM	Tube furnace set to 1000
10/30/2012	2:38:53 PM	Helium valve closed
10/30/2012	2:38:53 PM	BCl3 valve closed
10/30/2012	2:38:53 PM	PH3 valve closed
10/30/2012	2:38:53 PM	SiCl4 pre valve closed
10/30/2012	2:38:53 PM	SiCl4 post valve closed
10/30/2012	2:38:53 PM	Main Vac valve closed
10/30/2012	2:38:53 PM	Bypass valve closed
10/30/2012	2:38:53 PM	H2 valve opened
10/30/2012	2:38:53 PM	Bubbler valve opened
10/30/2012	2:38:53 PM	Helium MFC set to  0.000000
10/30/2012	2:38:53 PM	H2 MFC set to  500.000000
10/30/2012	2:38:53 PM	BCl3 MFC set to  0.000000
10/30/2012	2:38:53 PM	PH3 MFC set to  0.000000
10/30/2012	2:38:53 PM	SiCl4 MFC set to  0.000000
10/30/2012	2:38:53 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	2:38:53 PM	Tube furnace set to 950
10/30/2012	2:40:53 PM	Helium valve closed
10/30/2012	2:40:53 PM	BCl3 valve closed
10/30/2012	2:40:53 PM	PH3 valve closed
10/30/2012	2:40:53 PM	SiCl4 pre valve closed
10/30/2012	2:40:53 PM	SiCl4 post valve closed
10/30/2012	2:40:53 PM	Main Vac valve closed
10/30/2012	2:40:53 PM	Bypass valve closed
10/30/2012	2:40:53 PM	H2 valve opened
10/30/2012	2:40:54 PM	Bubbler valve opened
10/30/2012	2:40:54 PM	Helium MFC set to  0.000000
10/30/2012	2:40:54 PM	H2 MFC set to  500.000000
10/30/2012	2:40:54 PM	BCl3 MFC set to  0.000000
10/30/2012	2:40:54 PM	PH3 MFC set to  0.000000
10/30/2012	2:40:54 PM	SiCl4 MFC set to  0.000000
10/30/2012	2:40:54 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	2:40:54 PM	Tube furnace set to 900
10/30/2012	2:42:54 PM	Helium valve closed
10/30/2012	2:42:54 PM	BCl3 valve closed
10/30/2012	2:42:54 PM	PH3 valve closed
10/30/2012	2:42:54 PM	SiCl4 pre valve closed
10/30/2012	2:42:54 PM	SiCl4 post valve closed
10/30/2012	2:42:54 PM	Main Vac valve closed
10/30/2012	2:42:54 PM	Bypass valve closed
10/30/2012	2:42:54 PM	H2 valve opened
10/30/2012	2:42:54 PM	Bubbler valve opened
10/30/2012	2:42:54 PM	Helium MFC set to  0.000000
10/30/2012	2:42:54 PM	H2 MFC set to  500.000000
10/30/2012	2:42:54 PM	BCl3 MFC set to  0.000000
10/30/2012	2:42:54 PM	PH3 MFC set to  0.000000
10/30/2012	2:42:54 PM	SiCl4 MFC set to  0.000000
10/30/2012	2:42:54 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	2:42:54 PM	Tube furnace set to 850
10/30/2012	2:44:54 PM	H2 valve closed
10/30/2012	2:44:54 PM	BCl3 valve closed
10/30/2012	2:44:54 PM	PH3 valve closed
10/30/2012	2:44:54 PM	SiCl4 pre valve closed
10/30/2012	2:44:54 PM	SiCl4 post valve closed
10/30/2012	2:44:54 PM	Main Vac valve closed
10/30/2012	2:44:54 PM	Bypass valve closed
10/30/2012	2:44:54 PM	Helium valve opened
10/30/2012	2:44:54 PM	Bubbler valve opened
10/30/2012	2:44:54 PM	Helium MFC set to  500.000000
10/30/2012	2:44:54 PM	H2 MFC set to  0.000000
10/30/2012	2:44:54 PM	BCl3 MFC set to  0.000000
10/30/2012	2:44:54 PM	PH3 MFC set to  0.000000
10/30/2012	2:44:54 PM	SiCl4 MFC set to  0.000000
10/30/2012	2:44:54 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	2:44:54 PM	Tube furnace set to 800
10/30/2012	2:46:54 PM	H2 valve closed
10/30/2012	2:46:54 PM	BCl3 valve closed
10/30/2012	2:46:54 PM	PH3 valve closed
10/30/2012	2:46:54 PM	SiCl4 pre valve closed
10/30/2012	2:46:54 PM	SiCl4 post valve closed
10/30/2012	2:46:54 PM	Main Vac valve closed
10/30/2012	2:46:54 PM	Bypass valve closed
10/30/2012	2:46:54 PM	Helium valve opened
10/30/2012	2:46:54 PM	Bubbler valve opened
10/30/2012	2:46:54 PM	Helium MFC set to  500.000000
10/30/2012	2:46:54 PM	H2 MFC set to  0.000000
10/30/2012	2:46:54 PM	BCl3 MFC set to  0.000000
10/30/2012	2:46:54 PM	PH3 MFC set to  0.000000
10/30/2012	2:46:54 PM	SiCl4 MFC set to  0.000000
10/30/2012	2:46:54 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	2:46:54 PM	Tube furnace set to 750
10/30/2012	2:48:54 PM	H2 valve closed
10/30/2012	2:48:54 PM	BCl3 valve closed
10/30/2012	2:48:54 PM	PH3 valve closed
10/30/2012	2:48:54 PM	SiCl4 pre valve closed
10/30/2012	2:48:54 PM	SiCl4 post valve closed
10/30/2012	2:48:54 PM	Main Vac valve closed
10/30/2012	2:48:54 PM	Bypass valve closed
10/30/2012	2:48:54 PM	Helium valve opened
10/30/2012	2:48:54 PM	Bubbler valve opened
10/30/2012	2:48:55 PM	Helium MFC set to  500.000000
10/30/2012	2:48:55 PM	H2 MFC set to  0.000000
10/30/2012	2:48:55 PM	BCl3 MFC set to  0.000000
10/30/2012	2:48:55 PM	PH3 MFC set to  0.000000
10/30/2012	2:48:55 PM	SiCl4 MFC set to  0.000000
10/30/2012	2:48:55 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	2:48:55 PM	Tube furnace set to 0
10/30/2012	3:08:55 PM	Helium valve closed
10/30/2012	3:08:55 PM	H2 valve closed
10/30/2012	3:08:55 PM	BCl3 valve closed
10/30/2012	3:08:55 PM	PH3 valve closed
10/30/2012	3:08:55 PM	SiCl4 pre valve closed
10/30/2012	3:08:55 PM	SiCl4 post valve closed
10/30/2012	3:08:55 PM	Main Vac valve closed
10/30/2012	3:08:55 PM	Bypass valve closed
10/30/2012	3:08:55 PM	Bubbler valve closed
10/30/2012	3:08:55 PM	Helium MFC set to  0.000000
10/30/2012	3:08:55 PM	H2 MFC set to  0.000000
10/30/2012	3:08:55 PM	BCl3 MFC set to  0.000000
10/30/2012	3:08:55 PM	PH3 MFC set to  0.000000
10/30/2012	3:08:55 PM	SiCl4 MFC set to  0.000000
10/30/2012	3:08:55 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	3:08:55 PM	Tube furnace set to 0
10/30/2012	3:08:56 PM	Helium valve closed
10/30/2012	3:08:56 PM	H2 valve closed
10/30/2012	3:08:56 PM	BCl3 valve closed
10/30/2012	3:08:56 PM	PH3 valve closed
10/30/2012	3:08:56 PM	SiCl4 pre valve closed
10/30/2012	3:08:56 PM	SiCl4 post valve closed
10/30/2012	3:08:56 PM	Main Vac valve closed
10/30/2012	3:08:56 PM	Bubbler valve closed
10/30/2012	3:08:56 PM	Bypass valve opened
10/30/2012	3:08:56 PM	Helium MFC set to  0.000000
10/30/2012	3:08:56 PM	H2 MFC set to  0.000000
10/30/2012	3:08:56 PM	BCl3 MFC set to  0.000000
10/30/2012	3:08:56 PM	PH3 MFC set to  0.000000
10/30/2012	3:08:56 PM	SiCl4 MFC set to  0.000000
10/30/2012	3:08:56 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	3:08:56 PM	Tube furnace set to 0
10/30/2012	3:09:54 PM	Helium valve closed
10/30/2012	3:09:54 PM	H2 valve closed
10/30/2012	3:09:54 PM	BCl3 valve closed
10/30/2012	3:09:54 PM	PH3 valve closed
10/30/2012	3:09:54 PM	SiCl4 pre valve closed
10/30/2012	3:09:54 PM	SiCl4 post valve closed
10/30/2012	3:09:54 PM	Main Vac valve closed
10/30/2012	3:09:54 PM	Bubbler valve closed
10/30/2012	3:09:54 PM	Bypass valve opened
10/30/2012	3:09:54 PM	Helium MFC set to  0.000000
10/30/2012	3:09:54 PM	H2 MFC set to  0.000000
10/30/2012	3:09:54 PM	BCl3 MFC set to  0.000000
10/30/2012	3:09:54 PM	PH3 MFC set to  0.000000
10/30/2012	3:09:54 PM	SiCl4 MFC set to  0.000000
10/30/2012	3:09:54 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	3:09:54 PM	Tube furnace set to 0
10/30/2012	3:10:54 PM	Helium valve closed
10/30/2012	3:10:54 PM	H2 valve closed
10/30/2012	3:10:54 PM	BCl3 valve closed
10/30/2012	3:10:54 PM	PH3 valve closed
10/30/2012	3:10:54 PM	SiCl4 pre valve closed
10/30/2012	3:10:54 PM	SiCl4 post valve closed
10/30/2012	3:10:54 PM	Bypass valve closed
10/30/2012	3:10:54 PM	Bubbler valve closed
10/30/2012	3:10:54 PM	Main Vac valve opened
10/30/2012	3:10:54 PM	Helium MFC set to  0.000000
10/30/2012	3:10:54 PM	H2 MFC set to  0.000000
10/30/2012	3:10:54 PM	BCl3 MFC set to  0.000000
10/30/2012	3:10:54 PM	PH3 MFC set to  0.000000
10/30/2012	3:10:54 PM	SiCl4 MFC set to  0.000000
10/30/2012	3:10:54 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	3:10:54 PM	Tube furnace set to 0
10/30/2012	3:10:55 PM	Run finished at 3:10 PM
10/30/2012	3:37:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2012	3:37:11 PM	Recipe started at 3:37 PM
10/30/2012	3:37:11 PM	Helium valve closed
10/30/2012	3:37:11 PM	H2 valve closed
10/30/2012	3:37:11 PM	BCl3 valve closed
10/30/2012	3:37:11 PM	PH3 valve closed
10/30/2012	3:37:11 PM	SiCl4 pre valve closed
10/30/2012	3:37:11 PM	SiCl4 post valve closed
10/30/2012	3:37:11 PM	Main Vac valve closed
10/30/2012	3:37:11 PM	Bypass valve closed
10/30/2012	3:37:11 PM	Bubbler valve closed
10/30/2012	3:37:11 PM	Helium MFC set to  0.000000
10/30/2012	3:37:11 PM	H2 MFC set to  0.000000
10/30/2012	3:37:11 PM	BCl3 MFC set to  0.000000
10/30/2012	3:37:11 PM	PH3 MFC set to  0.000000
10/30/2012	3:37:11 PM	SiCl4 MFC set to  0.000000
10/30/2012	3:37:11 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	3:37:11 PM	Tube furnace set to 0
10/30/2012	3:37:14 PM	H2 valve closed
10/30/2012	3:37:14 PM	BCl3 valve closed
10/30/2012	3:37:14 PM	PH3 valve closed
10/30/2012	3:37:14 PM	SiCl4 pre valve closed
10/30/2012	3:37:14 PM	SiCl4 post valve closed
10/30/2012	3:37:14 PM	Main Vac valve closed
10/30/2012	3:37:14 PM	Bypass valve closed
10/30/2012	3:37:14 PM	Bubbler valve closed
10/30/2012	3:37:14 PM	Helium valve opened
10/30/2012	3:37:14 PM	Helium MFC set to  500.000000
10/30/2012	3:37:14 PM	H2 MFC set to  0.000000
10/30/2012	3:37:14 PM	BCl3 MFC set to  0.000000
10/30/2012	3:37:14 PM	PH3 MFC set to  0.000000
10/30/2012	3:37:14 PM	SiCl4 MFC set to  0.000000
10/30/2012	3:37:14 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	3:37:15 PM	Tube furnace set to 0
10/30/2012	3:38:27 PM	Helium valve closed
10/30/2012	3:38:27 PM	H2 valve closed
10/30/2012	3:38:27 PM	BCl3 valve closed
10/30/2012	3:38:27 PM	PH3 valve closed
10/30/2012	3:38:27 PM	SiCl4 pre valve closed
10/30/2012	3:38:27 PM	SiCl4 post valve closed
10/30/2012	3:38:27 PM	Main Vac valve closed
10/30/2012	3:38:27 PM	Bypass valve closed
10/30/2012	3:38:27 PM	Bubbler valve closed
10/30/2012	3:38:27 PM	Helium MFC set to  0.000000
10/30/2012	3:38:27 PM	H2 MFC set to  0.000000
10/30/2012	3:38:27 PM	BCl3 MFC set to  0.000000
10/30/2012	3:38:27 PM	PH3 MFC set to  0.000000
10/30/2012	3:38:27 PM	SiCl4 MFC set to  0.000000
10/30/2012	3:38:27 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	3:38:27 PM	Tube furnace set to 0
10/30/2012	3:38:28 PM	Run finished at 3:38 PM
10/30/2012	3:38:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2012	3:42:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2012	3:42:45 PM	Recipe started at 3:42 PM
10/30/2012	3:42:45 PM	Helium valve closed
10/30/2012	3:42:45 PM	H2 valve closed
10/30/2012	3:42:45 PM	BCl3 valve closed
10/30/2012	3:42:45 PM	PH3 valve closed
10/30/2012	3:42:45 PM	SiCl4 pre valve closed
10/30/2012	3:42:45 PM	SiCl4 post valve closed
10/30/2012	3:42:45 PM	Main Vac valve closed
10/30/2012	3:42:45 PM	Bubbler valve closed
10/30/2012	3:42:45 PM	Bypass valve opened
10/30/2012	3:42:45 PM	Helium MFC set to  0.000000
10/30/2012	3:42:45 PM	H2 MFC set to  0.000000
10/30/2012	3:42:45 PM	BCl3 MFC set to  0.000000
10/30/2012	3:42:45 PM	PH3 MFC set to  0.000000
10/30/2012	3:42:45 PM	SiCl4 MFC set to  0.000000
10/30/2012	3:42:45 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	3:42:45 PM	Tube furnace set to 0
10/30/2012	3:44:01 PM	Helium valve closed
10/30/2012	3:44:01 PM	H2 valve closed
10/30/2012	3:44:01 PM	BCl3 valve closed
10/30/2012	3:44:01 PM	PH3 valve closed
10/30/2012	3:44:01 PM	SiCl4 pre valve closed
10/30/2012	3:44:01 PM	SiCl4 post valve closed
10/30/2012	3:44:01 PM	Main Vac valve closed
10/30/2012	3:44:01 PM	Bubbler valve closed
10/30/2012	3:44:01 PM	Bypass valve opened
10/30/2012	3:44:01 PM	Helium MFC set to  0.000000
10/30/2012	3:44:01 PM	H2 MFC set to  0.000000
10/30/2012	3:44:01 PM	BCl3 MFC set to  0.000000
10/30/2012	3:44:01 PM	PH3 MFC set to  0.000000
10/30/2012	3:44:01 PM	SiCl4 MFC set to  0.000000
10/30/2012	3:44:01 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	3:44:01 PM	Tube furnace set to 0
10/30/2012	3:45:01 PM	Helium valve closed
10/30/2012	3:45:01 PM	H2 valve closed
10/30/2012	3:45:01 PM	BCl3 valve closed
10/30/2012	3:45:01 PM	PH3 valve closed
10/30/2012	3:45:01 PM	SiCl4 pre valve closed
10/30/2012	3:45:01 PM	SiCl4 post valve closed
10/30/2012	3:45:01 PM	Bypass valve closed
10/30/2012	3:45:01 PM	Bubbler valve closed
10/30/2012	3:45:01 PM	Main Vac valve opened
10/30/2012	3:45:01 PM	Helium MFC set to  0.000000
10/30/2012	3:45:01 PM	H2 MFC set to  0.000000
10/30/2012	3:45:01 PM	BCl3 MFC set to  0.000000
10/30/2012	3:45:01 PM	PH3 MFC set to  0.000000
10/30/2012	3:45:01 PM	SiCl4 MFC set to  0.000000
10/30/2012	3:45:01 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	3:45:02 PM	Tube furnace set to 0
10/30/2012	3:45:03 PM	Run finished at 3:45 PM
10/30/2012	3:45:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2012	4:16:02 PM	Recipe started at 4:15 PM
10/30/2012	4:16:02 PM	Helium valve closed
10/30/2012	4:16:02 PM	H2 valve closed
10/30/2012	4:16:02 PM	BCl3 valve closed
10/30/2012	4:16:02 PM	PH3 valve closed
10/30/2012	4:16:02 PM	SiCl4 pre valve closed
10/30/2012	4:16:02 PM	SiCl4 post valve closed
10/30/2012	4:16:02 PM	Main Vac valve closed
10/30/2012	4:16:02 PM	Bypass valve closed
10/30/2012	4:16:02 PM	Bubbler valve closed
10/30/2012	4:16:02 PM	Helium MFC set to  0.000000
10/30/2012	4:16:02 PM	H2 MFC set to  0.000000
10/30/2012	4:16:02 PM	BCl3 MFC set to  0.000000
10/30/2012	4:16:02 PM	PH3 MFC set to  0.000000
10/30/2012	4:16:02 PM	SiCl4 MFC set to  0.000000
10/30/2012	4:16:02 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	4:16:03 PM	Tube furnace set to 0
10/30/2012	4:16:06 PM	Helium valve closed
10/30/2012	4:16:06 PM	BCl3 valve closed
10/30/2012	4:16:06 PM	PH3 valve closed
10/30/2012	4:16:06 PM	SiCl4 pre valve closed
10/30/2012	4:16:06 PM	SiCl4 post valve closed
10/30/2012	4:16:06 PM	Main Vac valve closed
10/30/2012	4:16:06 PM	Bypass valve closed
10/30/2012	4:16:06 PM	Bubbler valve closed
10/30/2012	4:16:06 PM	H2 valve opened
10/30/2012	4:16:06 PM	Helium MFC set to  0.000000
10/30/2012	4:16:06 PM	H2 MFC set to  500.000000
10/30/2012	4:16:06 PM	BCl3 MFC set to  0.000000
10/30/2012	4:16:06 PM	PH3 MFC set to  0.000000
10/30/2012	4:16:06 PM	SiCl4 MFC set to  0.000000
10/30/2012	4:16:06 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	4:16:06 PM	Tube furnace set to 0
10/30/2012	4:17:20 PM	Helium valve closed
10/30/2012	4:17:20 PM	BCl3 valve closed
10/30/2012	4:17:20 PM	PH3 valve closed
10/30/2012	4:17:20 PM	SiCl4 pre valve closed
10/30/2012	4:17:20 PM	SiCl4 post valve closed
10/30/2012	4:17:20 PM	Main Vac valve closed
10/30/2012	4:17:20 PM	Bypass valve closed
10/30/2012	4:17:20 PM	H2 valve opened
10/30/2012	4:17:20 PM	Bubbler valve opened
10/30/2012	4:17:20 PM	Helium MFC set to  0.000000
10/30/2012	4:17:20 PM	H2 MFC set to  500.000000
10/30/2012	4:17:20 PM	BCl3 MFC set to  0.000000
10/30/2012	4:17:20 PM	PH3 MFC set to  0.000000
10/30/2012	4:17:20 PM	SiCl4 MFC set to  0.000000
10/30/2012	4:17:20 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	4:17:20 PM	Tube furnace set to 0
10/30/2012	4:17:21 PM	Helium valve closed
10/30/2012	4:17:21 PM	BCl3 valve closed
10/30/2012	4:17:21 PM	PH3 valve closed
10/30/2012	4:17:21 PM	SiCl4 pre valve closed
10/30/2012	4:17:21 PM	SiCl4 post valve closed
10/30/2012	4:17:21 PM	Main Vac valve closed
10/30/2012	4:17:21 PM	Bypass valve closed
10/30/2012	4:17:21 PM	H2 valve opened
10/30/2012	4:17:21 PM	Bubbler valve opened
10/30/2012	4:17:21 PM	Helium MFC set to  0.000000
10/30/2012	4:17:21 PM	H2 MFC set to  500.000000
10/30/2012	4:17:21 PM	BCl3 MFC set to  0.000000
10/30/2012	4:17:21 PM	PH3 MFC set to  0.000000
10/30/2012	4:17:21 PM	SiCl4 MFC set to  0.000000
10/30/2012	4:17:21 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	4:17:22 PM	Tube furnace set to 1000
10/30/2012	4:37:22 PM	Helium valve closed
10/30/2012	4:37:22 PM	PH3 valve closed
10/30/2012	4:37:22 PM	Main Vac valve closed
10/30/2012	4:37:22 PM	Bypass valve closed
10/30/2012	4:37:22 PM	H2 valve opened
10/30/2012	4:37:22 PM	BCl3 valve opened
10/30/2012	4:37:22 PM	SiCl4 pre valve opened
10/30/2012	4:37:22 PM	SiCl4 post valve opened
10/30/2012	4:37:22 PM	Bubbler valve opened
10/30/2012	4:37:22 PM	Helium MFC set to  0.000000
10/30/2012	4:37:22 PM	H2 MFC set to  450.000000
10/30/2012	4:37:22 PM	BCl3 MFC set to  1.500000
10/30/2012	4:37:22 PM	PH3 MFC set to  0.000000
10/30/2012	4:37:22 PM	SiCl4 MFC set to  50.000000
10/30/2012	4:37:22 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	4:37:22 PM	Tube furnace set to 1000
10/30/2012	4:50:22 PM	Helium valve closed
10/30/2012	4:50:22 PM	BCl3 valve closed
10/30/2012	4:50:22 PM	Main Vac valve closed
10/30/2012	4:50:22 PM	Bypass valve closed
10/30/2012	4:50:22 PM	H2 valve opened
10/30/2012	4:50:22 PM	PH3 valve opened
10/30/2012	4:50:22 PM	SiCl4 pre valve opened
10/30/2012	4:50:22 PM	SiCl4 post valve opened
10/30/2012	4:50:22 PM	Bubbler valve opened
10/30/2012	4:50:22 PM	Helium MFC set to  0.000000
10/30/2012	4:50:22 PM	H2 MFC set to  450.000000
10/30/2012	4:50:22 PM	BCl3 MFC set to  0.000000
10/30/2012	4:50:22 PM	PH3 MFC set to  20.000000
10/30/2012	4:50:22 PM	SiCl4 MFC set to  50.000000
10/30/2012	4:50:22 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	4:50:22 PM	Tube furnace set to 1000
10/30/2012	4:56:22 PM	Helium valve closed
10/30/2012	4:56:22 PM	BCl3 valve closed
10/30/2012	4:56:22 PM	PH3 valve closed
10/30/2012	4:56:22 PM	SiCl4 pre valve closed
10/30/2012	4:56:22 PM	SiCl4 post valve closed
10/30/2012	4:56:22 PM	Main Vac valve closed
10/30/2012	4:56:22 PM	Bypass valve closed
10/30/2012	4:56:22 PM	H2 valve opened
10/30/2012	4:56:22 PM	Bubbler valve opened
10/30/2012	4:56:22 PM	Helium MFC set to  0.000000
10/30/2012	4:56:22 PM	H2 MFC set to  500.000000
10/30/2012	4:56:22 PM	BCl3 MFC set to  0.000000
10/30/2012	4:56:22 PM	PH3 MFC set to  0.000000
10/30/2012	4:56:22 PM	SiCl4 MFC set to  0.000000
10/30/2012	4:56:22 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	4:56:22 PM	Tube furnace set to 950
10/30/2012	4:58:22 PM	Helium valve closed
10/30/2012	4:58:22 PM	BCl3 valve closed
10/30/2012	4:58:22 PM	PH3 valve closed
10/30/2012	4:58:22 PM	SiCl4 pre valve closed
10/30/2012	4:58:22 PM	SiCl4 post valve closed
10/30/2012	4:58:22 PM	Main Vac valve closed
10/30/2012	4:58:22 PM	Bypass valve closed
10/30/2012	4:58:22 PM	H2 valve opened
10/30/2012	4:58:22 PM	Bubbler valve opened
10/30/2012	4:58:22 PM	Helium MFC set to  0.000000
10/30/2012	4:58:22 PM	H2 MFC set to  500.000000
10/30/2012	4:58:22 PM	BCl3 MFC set to  0.000000
10/30/2012	4:58:22 PM	PH3 MFC set to  0.000000
10/30/2012	4:58:22 PM	SiCl4 MFC set to  0.000000
10/30/2012	4:58:22 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	4:58:23 PM	Tube furnace set to 900
10/30/2012	5:00:23 PM	Helium valve closed
10/30/2012	5:00:23 PM	BCl3 valve closed
10/30/2012	5:00:23 PM	PH3 valve closed
10/30/2012	5:00:23 PM	SiCl4 pre valve closed
10/30/2012	5:00:23 PM	SiCl4 post valve closed
10/30/2012	5:00:23 PM	Main Vac valve closed
10/30/2012	5:00:23 PM	Bypass valve closed
10/30/2012	5:00:23 PM	H2 valve opened
10/30/2012	5:00:23 PM	Bubbler valve opened
10/30/2012	5:00:23 PM	Helium MFC set to  0.000000
10/30/2012	5:00:23 PM	H2 MFC set to  500.000000
10/30/2012	5:00:23 PM	BCl3 MFC set to  0.000000
10/30/2012	5:00:23 PM	PH3 MFC set to  0.000000
10/30/2012	5:00:23 PM	SiCl4 MFC set to  0.000000
10/30/2012	5:00:23 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	5:00:23 PM	Tube furnace set to 850
10/30/2012	5:02:23 PM	H2 valve closed
10/30/2012	5:02:23 PM	BCl3 valve closed
10/30/2012	5:02:23 PM	PH3 valve closed
10/30/2012	5:02:23 PM	SiCl4 pre valve closed
10/30/2012	5:02:23 PM	SiCl4 post valve closed
10/30/2012	5:02:23 PM	Main Vac valve closed
10/30/2012	5:02:23 PM	Bypass valve closed
10/30/2012	5:02:23 PM	Helium valve opened
10/30/2012	5:02:23 PM	Bubbler valve opened
10/30/2012	5:02:23 PM	Helium MFC set to  500.000000
10/30/2012	5:02:23 PM	H2 MFC set to  0.000000
10/30/2012	5:02:23 PM	BCl3 MFC set to  0.000000
10/30/2012	5:02:23 PM	PH3 MFC set to  0.000000
10/30/2012	5:02:23 PM	SiCl4 MFC set to  0.000000
10/30/2012	5:02:23 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	5:02:23 PM	Tube furnace set to 800
10/30/2012	5:04:23 PM	H2 valve closed
10/30/2012	5:04:23 PM	BCl3 valve closed
10/30/2012	5:04:23 PM	PH3 valve closed
10/30/2012	5:04:23 PM	SiCl4 pre valve closed
10/30/2012	5:04:23 PM	SiCl4 post valve closed
10/30/2012	5:04:23 PM	Main Vac valve closed
10/30/2012	5:04:23 PM	Bypass valve closed
10/30/2012	5:04:23 PM	Helium valve opened
10/30/2012	5:04:23 PM	Bubbler valve opened
10/30/2012	5:04:23 PM	Helium MFC set to  500.000000
10/30/2012	5:04:23 PM	H2 MFC set to  0.000000
10/30/2012	5:04:23 PM	BCl3 MFC set to  0.000000
10/30/2012	5:04:23 PM	PH3 MFC set to  0.000000
10/30/2012	5:04:23 PM	SiCl4 MFC set to  0.000000
10/30/2012	5:04:23 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	5:04:23 PM	Tube furnace set to 750
10/30/2012	5:06:23 PM	H2 valve closed
10/30/2012	5:06:23 PM	BCl3 valve closed
10/30/2012	5:06:23 PM	PH3 valve closed
10/30/2012	5:06:23 PM	SiCl4 pre valve closed
10/30/2012	5:06:23 PM	SiCl4 post valve closed
10/30/2012	5:06:23 PM	Main Vac valve closed
10/30/2012	5:06:23 PM	Bypass valve closed
10/30/2012	5:06:23 PM	Helium valve opened
10/30/2012	5:06:23 PM	Bubbler valve opened
10/30/2012	5:06:23 PM	Helium MFC set to  500.000000
10/30/2012	5:06:23 PM	H2 MFC set to  0.000000
10/30/2012	5:06:23 PM	BCl3 MFC set to  0.000000
10/30/2012	5:06:23 PM	PH3 MFC set to  0.000000
10/30/2012	5:06:23 PM	SiCl4 MFC set to  0.000000
10/30/2012	5:06:23 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	5:06:24 PM	Tube furnace set to 0
10/30/2012	5:26:24 PM	Helium valve closed
10/30/2012	5:26:24 PM	H2 valve closed
10/30/2012	5:26:24 PM	BCl3 valve closed
10/30/2012	5:26:24 PM	PH3 valve closed
10/30/2012	5:26:24 PM	SiCl4 pre valve closed
10/30/2012	5:26:24 PM	SiCl4 post valve closed
10/30/2012	5:26:24 PM	Main Vac valve closed
10/30/2012	5:26:24 PM	Bypass valve closed
10/30/2012	5:26:24 PM	Bubbler valve closed
10/30/2012	5:26:24 PM	Helium MFC set to  0.000000
10/30/2012	5:26:24 PM	H2 MFC set to  0.000000
10/30/2012	5:26:24 PM	BCl3 MFC set to  0.000000
10/30/2012	5:26:24 PM	PH3 MFC set to  0.000000
10/30/2012	5:26:24 PM	SiCl4 MFC set to  0.000000
10/30/2012	5:26:24 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	5:26:24 PM	Tube furnace set to 0
10/30/2012	5:26:25 PM	Helium valve closed
10/30/2012	5:26:25 PM	H2 valve closed
10/30/2012	5:26:25 PM	BCl3 valve closed
10/30/2012	5:26:25 PM	PH3 valve closed
10/30/2012	5:26:25 PM	SiCl4 pre valve closed
10/30/2012	5:26:25 PM	SiCl4 post valve closed
10/30/2012	5:26:25 PM	Main Vac valve closed
10/30/2012	5:26:25 PM	Bubbler valve closed
10/30/2012	5:26:25 PM	Bypass valve opened
10/30/2012	5:26:25 PM	Helium MFC set to  0.000000
10/30/2012	5:26:25 PM	H2 MFC set to  0.000000
10/30/2012	5:26:25 PM	BCl3 MFC set to  0.000000
10/30/2012	5:26:25 PM	PH3 MFC set to  0.000000
10/30/2012	5:26:25 PM	SiCl4 MFC set to  0.000000
10/30/2012	5:26:25 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	5:26:25 PM	Tube furnace set to 0
10/30/2012	5:27:23 PM	Helium valve closed
10/30/2012	5:27:23 PM	H2 valve closed
10/30/2012	5:27:23 PM	BCl3 valve closed
10/30/2012	5:27:23 PM	PH3 valve closed
10/30/2012	5:27:23 PM	SiCl4 pre valve closed
10/30/2012	5:27:23 PM	SiCl4 post valve closed
10/30/2012	5:27:23 PM	Main Vac valve closed
10/30/2012	5:27:23 PM	Bubbler valve closed
10/30/2012	5:27:23 PM	Bypass valve opened
10/30/2012	5:27:23 PM	Helium MFC set to  0.000000
10/30/2012	5:27:23 PM	H2 MFC set to  0.000000
10/30/2012	5:27:23 PM	BCl3 MFC set to  0.000000
10/30/2012	5:27:23 PM	PH3 MFC set to  0.000000
10/30/2012	5:27:23 PM	SiCl4 MFC set to  0.000000
10/30/2012	5:27:23 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	5:27:23 PM	Tube furnace set to 0
10/30/2012	5:28:23 PM	Helium valve closed
10/30/2012	5:28:23 PM	H2 valve closed
10/30/2012	5:28:23 PM	BCl3 valve closed
10/30/2012	5:28:23 PM	PH3 valve closed
10/30/2012	5:28:23 PM	SiCl4 pre valve closed
10/30/2012	5:28:23 PM	SiCl4 post valve closed
10/30/2012	5:28:23 PM	Bypass valve closed
10/30/2012	5:28:23 PM	Bubbler valve closed
10/30/2012	5:28:23 PM	Main Vac valve opened
10/30/2012	5:28:23 PM	Helium MFC set to  0.000000
10/30/2012	5:28:23 PM	H2 MFC set to  0.000000
10/30/2012	5:28:23 PM	BCl3 MFC set to  0.000000
10/30/2012	5:28:23 PM	PH3 MFC set to  0.000000
10/30/2012	5:28:23 PM	SiCl4 MFC set to  0.000000
10/30/2012	5:28:23 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	5:28:24 PM	Tube furnace set to 0
10/30/2012	5:28:25 PM	Run finished at 5:28 PM
10/30/2012	5:49:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2012	5:49:32 PM	Recipe started at 5:49 PM
10/30/2012	5:49:32 PM	Helium valve closed
10/30/2012	5:49:32 PM	H2 valve closed
10/30/2012	5:49:32 PM	BCl3 valve closed
10/30/2012	5:49:32 PM	PH3 valve closed
10/30/2012	5:49:32 PM	SiCl4 pre valve closed
10/30/2012	5:49:32 PM	SiCl4 post valve closed
10/30/2012	5:49:32 PM	Main Vac valve closed
10/30/2012	5:49:32 PM	Bypass valve closed
10/30/2012	5:49:32 PM	Bubbler valve closed
10/30/2012	5:49:32 PM	Helium MFC set to  0.000000
10/30/2012	5:49:32 PM	H2 MFC set to  0.000000
10/30/2012	5:49:32 PM	BCl3 MFC set to  0.000000
10/30/2012	5:49:32 PM	PH3 MFC set to  0.000000
10/30/2012	5:49:32 PM	SiCl4 MFC set to  0.000000
10/30/2012	5:49:32 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	5:49:32 PM	Tube furnace set to 0
10/30/2012	5:49:35 PM	H2 valve closed
10/30/2012	5:49:35 PM	BCl3 valve closed
10/30/2012	5:49:35 PM	PH3 valve closed
10/30/2012	5:49:35 PM	SiCl4 pre valve closed
10/30/2012	5:49:35 PM	SiCl4 post valve closed
10/30/2012	5:49:35 PM	Main Vac valve closed
10/30/2012	5:49:35 PM	Bypass valve closed
10/30/2012	5:49:35 PM	Bubbler valve closed
10/30/2012	5:49:35 PM	Helium valve opened
10/30/2012	5:49:35 PM	Helium MFC set to  500.000000
10/30/2012	5:49:35 PM	H2 MFC set to  0.000000
10/30/2012	5:49:35 PM	BCl3 MFC set to  0.000000
10/30/2012	5:49:35 PM	PH3 MFC set to  0.000000
10/30/2012	5:49:35 PM	SiCl4 MFC set to  0.000000
10/30/2012	5:49:35 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	5:49:35 PM	Tube furnace set to 0
10/30/2012	5:50:47 PM	Helium valve closed
10/30/2012	5:50:47 PM	H2 valve closed
10/30/2012	5:50:47 PM	BCl3 valve closed
10/30/2012	5:50:47 PM	PH3 valve closed
10/30/2012	5:50:47 PM	SiCl4 pre valve closed
10/30/2012	5:50:47 PM	SiCl4 post valve closed
10/30/2012	5:50:47 PM	Main Vac valve closed
10/30/2012	5:50:47 PM	Bypass valve closed
10/30/2012	5:50:47 PM	Bubbler valve closed
10/30/2012	5:50:47 PM	Helium MFC set to  0.000000
10/30/2012	5:50:47 PM	H2 MFC set to  0.000000
10/30/2012	5:50:47 PM	BCl3 MFC set to  0.000000
10/30/2012	5:50:47 PM	PH3 MFC set to  0.000000
10/30/2012	5:50:47 PM	SiCl4 MFC set to  0.000000
10/30/2012	5:50:47 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	5:50:47 PM	Tube furnace set to 0
10/30/2012	5:50:48 PM	Run finished at 5:50 PM
10/30/2012	5:50:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/30/2012	6:02:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2012	6:02:28 PM	Recipe started at 6:02 PM
10/30/2012	6:02:28 PM	Helium valve closed
10/30/2012	6:02:28 PM	H2 valve closed
10/30/2012	6:02:28 PM	BCl3 valve closed
10/30/2012	6:02:28 PM	PH3 valve closed
10/30/2012	6:02:28 PM	SiCl4 pre valve closed
10/30/2012	6:02:28 PM	SiCl4 post valve closed
10/30/2012	6:02:28 PM	Main Vac valve closed
10/30/2012	6:02:28 PM	Bubbler valve closed
10/30/2012	6:02:28 PM	Bypass valve opened
10/30/2012	6:02:28 PM	Helium MFC set to  0.000000
10/30/2012	6:02:28 PM	H2 MFC set to  0.000000
10/30/2012	6:02:28 PM	BCl3 MFC set to  0.000000
10/30/2012	6:02:28 PM	PH3 MFC set to  0.000000
10/30/2012	6:02:28 PM	SiCl4 MFC set to  0.000000
10/30/2012	6:02:28 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	6:02:28 PM	Tube furnace set to 0
10/30/2012	6:05:39 PM	Run aborted at 6:05 PM
10/30/2012	6:05:39 PM	Helium valve closed
10/30/2012	6:05:39 PM	H2 valve closed
10/30/2012	6:05:39 PM	BCl3 valve closed
10/30/2012	6:05:39 PM	PH3 valve closed
10/30/2012	6:05:39 PM	SiCl4 pre valve closed
10/30/2012	6:05:39 PM	SiCl4 post valve closed
10/30/2012	6:05:39 PM	Bypass valve closed
10/30/2012	6:05:39 PM	Main Vac valve closed
10/30/2012	6:05:39 PM	Bubbler valve closed
10/30/2012	6:05:39 PM	Helium MFC set to  0.000000
10/30/2012	6:05:39 PM	H2 MFC set to  0.000000
10/30/2012	6:05:39 PM	BCl3 MFC set to  0.000000
10/30/2012	6:05:39 PM	PH3 MFC set to  0.000000
10/30/2012	6:05:39 PM	SiCl4 MFC set to  0.000000
10/30/2012	6:05:39 PM	Tube furnace set to 0
10/30/2012	6:05:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2012	6:07:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/30/2012	6:07:37 PM	Recipe started at 6:07 PM
10/30/2012	6:07:37 PM	Helium valve closed
10/30/2012	6:07:37 PM	H2 valve closed
10/30/2012	6:07:37 PM	BCl3 valve closed
10/30/2012	6:07:37 PM	PH3 valve closed
10/30/2012	6:07:37 PM	SiCl4 pre valve closed
10/30/2012	6:07:37 PM	SiCl4 post valve closed
10/30/2012	6:07:37 PM	Main Vac valve closed
10/30/2012	6:07:37 PM	Bubbler valve closed
10/30/2012	6:07:37 PM	Bypass valve opened
10/30/2012	6:07:37 PM	Helium MFC set to  0.000000
10/30/2012	6:07:38 PM	H2 MFC set to  0.000000
10/30/2012	6:07:38 PM	BCl3 MFC set to  0.000000
10/30/2012	6:07:38 PM	PH3 MFC set to  0.000000
10/30/2012	6:07:38 PM	SiCl4 MFC set to  0.000000
10/30/2012	6:07:38 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	6:07:38 PM	Tube furnace set to 0
10/30/2012	6:09:16 PM	Helium valve closed
10/30/2012	6:09:16 PM	H2 valve closed
10/30/2012	6:09:16 PM	BCl3 valve closed
10/30/2012	6:09:16 PM	PH3 valve closed
10/30/2012	6:09:16 PM	SiCl4 pre valve closed
10/30/2012	6:09:16 PM	SiCl4 post valve closed
10/30/2012	6:09:16 PM	Main Vac valve closed
10/30/2012	6:09:16 PM	Bubbler valve closed
10/30/2012	6:09:16 PM	Bypass valve opened
10/30/2012	6:09:16 PM	Helium MFC set to  0.000000
10/30/2012	6:09:16 PM	H2 MFC set to  0.000000
10/30/2012	6:09:16 PM	BCl3 MFC set to  0.000000
10/30/2012	6:09:16 PM	PH3 MFC set to  0.000000
10/30/2012	6:09:16 PM	SiCl4 MFC set to  0.000000
10/30/2012	6:09:16 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	6:09:16 PM	Tube furnace set to 0
10/30/2012	6:10:16 PM	Helium valve closed
10/30/2012	6:10:16 PM	H2 valve closed
10/30/2012	6:10:16 PM	BCl3 valve closed
10/30/2012	6:10:16 PM	PH3 valve closed
10/30/2012	6:10:16 PM	SiCl4 pre valve closed
10/30/2012	6:10:16 PM	SiCl4 post valve closed
10/30/2012	6:10:16 PM	Bypass valve closed
10/30/2012	6:10:16 PM	Bubbler valve closed
10/30/2012	6:10:16 PM	Main Vac valve opened
10/30/2012	6:10:16 PM	Helium MFC set to  0.000000
10/30/2012	6:10:16 PM	H2 MFC set to  0.000000
10/30/2012	6:10:16 PM	BCl3 MFC set to  0.000000
10/30/2012	6:10:16 PM	PH3 MFC set to  0.000000
10/30/2012	6:10:16 PM	SiCl4 MFC set to  0.000000
10/30/2012	6:10:16 PM	Bypass solenoid MFC set to  0.000000
10/30/2012	6:10:16 PM	Tube furnace set to 0
10/30/2012	6:10:17 PM	Run finished at 6:10 PM
10/30/2012	6:10:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
